- Home
- Equipment
Refine by
E+H Metrology Energy Equipment & Supplies
2 equipment items found
Manufactured by:E+H Metrology GmbH based inKarlsruhe, GERMANY
Automatic wafer geometry gauge.Wafer diameter 2', 3' and 4'.Thickness range 200 - 800µm.Accuracy 1µm.Resolution 0.1µm.Software ...
Manufactured by:E+H Metrology GmbH based inKarlsruhe, GERMANY
The thickness and warp measurements are performed in two consecutive stages.In the first stage, the warp measurement, the upper probe head is in the raised position, the air gap between the probe heads is wide, and the wafer is resting freely on the surface of the lower probe head. Only the distance sensors of the lower probe head are used for measuring. The wafer shape measured under these ...
